Free vibration of axially loaded microbeam in MEMS based on sinusoidal shear deformation theory

Free vibration of an axially loaded silicon microbeam in MEMS under electrostatic actuation is studied on the basis a sinusoidal shear deformation theory. Based modified couple stress theory (MCST) and von Kármán geometric nonlinearity, nonlinear finite element formulation derived employed to construct discrete governing equations for microbeam. The deflection at given DC voltage firstly calculated using Newton Raphson based iterative procedure, used evaluate tangent stiffness matrix. natural frequencies corresponding are then computed. influence applied voltage, axial force as well material length scale parameter detail highlighted. dependence pull-in upon also examined discussed.